About
Mission
Our Vision
EHT Semi develops power systems that enable new capabilities in semiconductor processing applications. Our plasma control expertise is built on decades of experience developing power systems and integrating them into plasma systems.
At EHT, we believe that producing high-quality power products that enhance precision and control requires:
- Scientists and engineers who understand the fundamental physics of power system design and operation along with plasma dynamics;
- Tight integration of teams developing software, control hardware, and power systems;
- Continuity through the design, build, test, and delivery process;
- A dynamic and diverse team that is dedicated to learning and delivering high-quality products.
Quick Facts
Founded in 2005
Seattle, WA Headquarters
35,000 sq-ft facility
Over 250 patents granted and applications
High volume manufacturing ready
Our Story
Founding in 2005, EHT Semi has decades of experience solving complex challenges at the interface of plasma and power. The waveforms required for precision plasma control in advanced semiconductor manufacturing can only be obtained through tightly integrating the chamber, power system, and plasma. We optimize these systems and help our customers stay on the leading edge of technology.
Today, EHT Semi focuses on solving complex plasma control challenges with next-generation power systems for semiconductor manufacturing. Our evolution from early technology development to full-scale product deployment reflects a commitment to engineering excellence and customer success. Today, we provide advanced RF and bias power platforms that integrate seamlessly with leading etch and deposition tools, ensuring superior process control and performance.
Our Advanced Facilities
EHT’s 35,000 sq. ft. facility includes offices, computer lab, manufacturing areas, a machine shop, inventory, high-voltage testing rooms, and ultra-high-vacuum testing areas.
Our 10,000 sq. ft. manufacturing facility is reconfigurable to adapt to support power system builds up to 100s units/year. The space allows easy access to our modern inventory system, machine shop (including additive manufacturing systems), and high-voltage test rooms.
Our high-voltage test rooms are fully gated, isolated, and interlocked to keep personnel and equipment safe during high voltage operation. Diagnostics and data acquisition include state-of-the-art oscilloscopes and probes allowing measurement of signals up to 2 GHz and 100 kV. A chiller system is used for water cooling of power systems and loads, while thermal cameras allow test operators to monitor temperatures of critical components.
The Robert Winglee Plasma Laboratory contains experimental CCP and ICP systems for prototyping new power systems. These chambers can be outfitted with plasma diagnostics for capturing plasma density, energy distributions, and temperature. The lab also contains infrastructure for customer chambers to accelerate the integration of matchless RF and bias power systems.
The facility also includes access-controlled rooms with test facilities that can be used by our customers for long-term co-development programs.
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Join our team to be part of a company committed to developing precision pulsed-power solutions.