Skip to content

News Archives - EHT Semi

EHT at AVS 69th International Symposium & Exhibition

EHT will be exhibiting and presenting research at the American Vacuum Society 69th International Symposium & Exhibition. Visit us at our booth (616) on Tuesday-Thursday. Come see our CEO, Dr. Tim Ziemba, present a poster “Ion Energy Control in a Capacitively Coupled Plasma with a High Voltage Custom Waveform Bias” on Tuesday (Nov 7) from…

Read More

EHT at APS DPP

Dr. James Prager will be presenting a poster at the 65th Annual Meeting of the American Physical Society Division of Plasma Physics. The poster, titled “Demonstration of Ion Energy Distribution Control in a Capacitively Coupled Plasma” will be presented on Tuesday morning (October 31, 2023). Check out the abstract for more details.

Read More

Gary Bultman Joins Eagle Harbor Technologies to Advise on Integrating Pulsed Power into Semiconductor Manufacturing

Eagle Harbor Technologies, Inc. (EHT), a leading developer of advanced solid-state pulsed power systems, is pleased to announce Gary Bultman has joined EHT as a strategic advisor. With his extensive experience in the semiconductor industry, Mr. Bultman will provide his expertise on product roadmaps to integrate pulsed power systems into this industry. “We are thrilled…

Read More

Supporting 50 Years of ICOPS

EHT is proud to support the fiftieth anniversary of the International Conference on Plasma Science (ICOPS). We are showcasing our pulse generators for plasma applications including low-temperature plasmas and fusion energy at ICOPS in Santa Fe, NM. Additionally, Dr Prager will be presenting a poster, “Ion Energy Measurements in a Capacitively Coupled Plasma with a…

Read More

“Improving Ion Control for Semiconductor Processing with Repetitive Pulsed Power” Selected for Funding

DOE selected EHT’s proposal “Improving Ion Control for Semiconductor Processing with Repetitive Pulsed Power” for a Phase II award under the Office of Fusion Science’s Low-Temperature Plasma SBIR program. Abstract: The ability to use plasma etching to produce high aspect ratio (HAR) features is becoming increasingly important as the market demands solid-state non-volatile memory storage. In…

Read More

EHT at ICOPS 2022

EHT is excited to be showcasing our pulse generators for plasma applications including low-temperature plasmas and fusion energy at the International Conference on Plasma Science (ICOPS) in Seattle, WA. Additionally, Dr Prager will be presenting a poster, “Improving Ion Control for Semiconductor Processing with Repetitive Pulsed Power – Phase I” (PO 5.03) on Tuesday afternoon.

Read More

In Memory of Dr. Robert Winglee

Everyone at EHT is deeply saddened at the news of Robert’s passing. It is absolutely true that without Robert EHT would probably not have existed. Four of the five founding members studied, worked, and collaborated with Robert. I was one of Robert’s first graduate students and was his first experimental graduate student, where he trusted…

Read More