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Pulse Generators

EHT Semi pulse generators produce tailored waveforms that bring new advantages to the semiconductor industry.

  • More tightly controlled wafer voltages result in narrower ion energy distributions, which allows for increased control over process results including smaller critical dimensions.
  • Increased flexibility for multistate or multilevel operation (arbitrary number of states with fast transitions between states).
  • Fast rise and fall times compared to RF sine-wave generators results in increased etch time per cycle.
  • No matching network is required, reducing complexity and size.
  • Very broad range of dynamically-adjustable pulse repetition frequencies.

All of our pulse generators can be customized, or we can build systems specifically for your application.