Precision Power for Semiconductor Manufacturing
EHT Semi is pioneering novel, matchless RF and tailored waveform generators to improve plasma control and reliability for next-generation semiconductor manufacturing.
Processing Power Challenges Today
Traditional RF power delivery relies on matching networks to compensate for the plasma’s constantly changing impedance, but they struggle to keep up with dynamic plasma conditions.
As processes demand fast and reliable breakdown, quick transitions, and tighter control, these networks are a bottleneck with a slow response, added complexity, and power loss.
The EHT Semi Solution
EHT's Orion Direct RF System eliminates matching networks entirely, delivering power directly to the plasma with real-time impedance handling. Paired with EHT's tailored waveform generators, they enable precise control of plasma dynamics for superior uniformity and stability.
This breakthrough reduces footprint, improves efficiency, and lowers cost of ownership. They increase stability and reliability to give tool makers the performance edge needed for next-generation semiconductor manufacturing.
EHT Semi Announcements
EHT Semi Integrates Bird RF Measurement to Strengthen Semiconductor Process Control
Embedded RF measurement provides consistency across calibration, process development, and production. Seattle, WA — October 12, 2026 — EHT Semi today announced the integration of Bird RF measurement technology into its semiconductor power platforms, including the Orion™ Direct RF™ System and tailored waveform generators. An embedded Bird probe, with NIST-traceable calibration, provides the primary measurement…
Read MoreEHT at Semicon West 2026
EHT Semi will be exhibiting at Semicon West October 13-15, 2026. Stop by our booth to learn more about our power systems for improving plasma control.
Read MoreOrion™ Direct RF™ Eliminates Matching Networks, Enabling Breakthrough Pulsed Plasma Performance
EHT Semi today announced a new peer-reviewed publication demonstrating how its Orion™ Direct RF™ system eliminates the need for traditional RF matching networks, which enables faster response, improved power coupling, and access to entirely new pulsed plasma regimes. Conventional RF systems rely on matching networks that struggle to keep pace with rapidly changing plasma conditions,…
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ConsultingEHT Announcements
Gary Bultman Joins Eagle Harbor Technologies to Advise on Integrating Pulsed Power into Semiconductor Manufacturing
Precision Power for Semiconductor Manufacturing EHT Semi is pioneering novel, matchless RF and tailored waveform generators to improve plasma control and reliability for next-generation semiconductor manufacturing. Processing Power Challenges Today Traditional RF power delivery relies on matching networks to compensate for the plasma’s constantly changing impedance, but they struggle to keep up with dynamic plasma…
Read More“Improving Ion Control for Semiconductor Processing with Repetitive Pulsed Power” Selected for Funding
Precision Power for Semiconductor Manufacturing EHT Semi is pioneering novel, matchless RF and tailored waveform generators to improve plasma control and reliability for next-generation semiconductor manufacturing. Processing Power Challenges Today Traditional RF power delivery relies on matching networks to compensate for the plasma’s constantly changing impedance, but they struggle to keep up with dynamic plasma…
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