Precision Power for Semiconductor Manufacturing
EHT Semi is pioneering novel, matchless RF and tailored waveform generators to improve plasma control and reliability for next-generation semiconductor manufacturing.
Processing Power Challenges Today
Traditional RF power delivery relies on matching networks to compensate for the plasma’s constantly changing impedance, but they struggle to keep up with dynamic plasma conditions.
As processes demand fast and reliable breakdown, quick transitions, and tighter control, these networks are a bottleneck with a slow response, added complexity, and power loss.
The EHT Semi Solution
EHT's Orion Direct RF System eliminates matching networks entirely, delivering power directly to the plasma with real-time impedance handling. Paired with EHT's tailored waveform generators, they enable precise control of plasma dynamics for superior uniformity and stability.
This breakthrough reduces footprint, improves efficiency, and lowers cost of ownership. They increase stability and reliability to give tool makers the performance edge needed for next-generation semiconductor manufacturing.
EHT Semi Announcements
Orion™ Direct RF™ Eliminates Matching Networks, Enabling Breakthrough Pulsed Plasma Performance
EHT Semi today announced a new peer-reviewed publication demonstrating how its Orion™ Direct RF™ system eliminates the need for traditional RF matching networks, which enables faster response, improved power coupling, and access to entirely new pulsed plasma regimes. Conventional RF systems rely on matching networks that struggle to keep pace with rapidly changing plasma conditions,…
Read MoreJabil Invests in EHT Semi to Accelerate Advanced RF and Pulsed Power Solutions for Next-Generation Semiconductor Manufacturing
Press Release from Jabil, Inc.: ST. PETERSBURG, Fla.–(BUSINESS WIRE)– Jabil Inc. (NYSE: JBL), a global leader in engineering, supply chain, and manufacturing solutions, announced today a strategic minority investment and manufacturing collaboration with Eagle Harbor Technologies, Inc. (dba, EHT Semi), a pioneer in RF and pulsed-power systems. This collaboration combines Jabil’s world-class manufacturing capabilities with EHT Semi’s innovative power…
Read MoreEHT at Semicon West 2025
EHT Semi will be exhibiting at Semicon West next week. Stop by our booth to learn more about our power systems for improving plasma control.
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Products
Research
ConsultingEHT Announcements
Gary Bultman Joins Eagle Harbor Technologies to Advise on Integrating Pulsed Power into Semiconductor Manufacturing
Precision Power for Semiconductor Manufacturing EHT Semi is pioneering novel, matchless RF and tailored waveform generators to improve plasma control and reliability for next-generation semiconductor manufacturing. Processing Power Challenges Today Traditional RF power delivery relies on matching networks to compensate for the plasma’s constantly changing impedance, but they struggle to keep up with dynamic plasma…
Read More“Improving Ion Control for Semiconductor Processing with Repetitive Pulsed Power” Selected for Funding
Precision Power for Semiconductor Manufacturing EHT Semi is pioneering novel, matchless RF and tailored waveform generators to improve plasma control and reliability for next-generation semiconductor manufacturing. Processing Power Challenges Today Traditional RF power delivery relies on matching networks to compensate for the plasma’s constantly changing impedance, but they struggle to keep up with dynamic plasma…
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