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Precision Pulsed Power for Semiconductors

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Precision Pulsed Power for Semiconductors

EHT Semi specializes in developing power systems for generating and controlling plasmas to improve semiconductor processing performance.

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What We Do

EHT Semi provides innovative power solutions to solve next-generation challenges for semiconductor processing applications. Our physics-based approach allows us to rapidly develop unique solid-state switching systems and integrate them into customer tools to improve their processing performance.

EHT Semi personnel have decades of experience solving complex challenges at the interface of plasma and power.

The waveforms required for precision plasma control in advanced semiconductor processes can only be obtained through tightly integrating the chamber, power system, and plasma. Our research-based approach allows us to optimize these systems and help our customers stay on the leading edge of technology.

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EHT Semi Announcements

EHT at AVS 69th International Symposium & Exhibition

October 23, 2023

EHT will be exhibiting and presenting research at the American Vacuum Society 69th International Symposium & Exhibition. Visit us at our booth (616) on Tuesday-Thursday. Come see our CEO, Dr. Tim Ziemba, present a poster “Ion Energy Control in a Capacitively Coupled Plasma with a High Voltage Custom Waveform Bias” on Tuesday (Nov 7) from…

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EHT at APS DPP

October 23, 2023

Dr. James Prager will be presenting a poster at the 65th Annual Meeting of the American Physical Society Division of Plasma Physics. The poster, titled “Demonstration of Ion Energy Distribution Control in a Capacitively Coupled Plasma” will be presented on Tuesday morning (October 31, 2023). Check out the abstract for more details.

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Gary Bultman Joins Eagle Harbor Technologies to Advise on Integrating Pulsed Power into Semiconductor Manufacturing

August 15, 2023

Eagle Harbor Technologies, Inc. (EHT), a leading developer of advanced solid-state pulsed power systems, is pleased to announce Gary Bultman has joined EHT as a strategic advisor. With his extensive experience in the semiconductor industry, Mr. Bultman will provide his expertise on product roadmaps to integrate pulsed power systems into this industry. “We are thrilled…

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EHT Announcements

Gary Bultman Joins Eagle Harbor Technologies to Advise on Integrating Pulsed Power into Semiconductor Manufacturing

Precision Pulsed Power for Semiconductors EHT Semi specializes in developing power systems for generating and controlling plasmas to improve semiconductor processing performance. What We Do EHT Semi provides innovative power solutions to solve next-generation challenges for semiconductor processing applications. Our physics-based approach allows us to rapidly develop unique solid-state switching systems and integrate them into…

Read More

“Improving Ion Control for Semiconductor Processing with Repetitive Pulsed Power” Selected for Funding

Precision Pulsed Power for Semiconductors EHT Semi specializes in developing power systems for generating and controlling plasmas to improve semiconductor processing performance. What We Do EHT Semi provides innovative power solutions to solve next-generation challenges for semiconductor processing applications. Our physics-based approach allows us to rapidly develop unique solid-state switching systems and integrate them into…

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